Gerätedetails

Volume analysis and reconstruction of components and parts of modules

• Open nanofocus tube with tungsten target
• Acceleration voltage: 10 – 180kV / 15W
• Beam current: 5 – 1.000µA
• Precision manipulator on a granite basis
• High resolution digital detector with 2.400 x 2.400 pixel, 12 Bit
• Pixel size: 50µm x 50µm
• Min. voxel size: < (500nm x 500nm x 500nm)
• Geometrical magnification: 1,7x…1.000x
• Max. specimen size / weight: h = 150mm, d = 120mm, m = 1kg