Equipment Details
Exposurer
EXP 8000
Exposurer
Exposure
Photo lithography
Bungard Elektronik GmbH & Co. KG
UV light exposure of photo resists
- Double sided exposuring
- 2 x 4000W Hg lamps
- Vacuum frame
- Lightning table, working area (600 x 600)mm²
- automatic measurement of light quantity
WHB 164
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