Equipment Details

Fabrication of Van der Waals hetero structures

• Integrated in nitrogen atmosphere glove box
• Fully controllable from outside
• XYZ motorised micro-manipulator
• Full travel: 20×20×20 mm
• Resolution: 40 nm
• Substrate chuck temperature controller, Max. temperature 150°C, stability better than 0.2°C
• Objective lenses (5 position motorised revolving nosepiece)
• 5× (0.15 NA, 23.5 mm WD), 10× (0.3 NA, 17.5 mm WD), 20× (0.4 NA, 19.0 mm WD), 50x (0.6 NA, 11.0 mm WD), 100× (0.9 NA, 1.0 mm WD) - ultra-high resolution, darkfield capable
• High intensity illuminator with filter wheel and set of narrow band-pass filters (10 nm bandwidth)
• Motorised sample scanning stage (X, Y & rotation) with vacuum chuck, full travel: 75×50 mm, resolution: 0.1 μm