Equipment Details
Stylus Profilometer
DekTakXTA
Measurement equipment
Diagnostics
Geometr. characterisation
Non-destructive evaluation
DekTak
(kein Bild verfügbar - no image available)
Stylus profilometer for surfaces and roughness measurement with line or area scan
- Measurement area: Max. 8“ wafer size
- Step height: 0,5 nm ... 1 mm
- Lateral resolution: > 1 nm in scan direction, > 1 µm between scan lines
- Available styli: 2 µm and 50 nm tip radius
WHB 133
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