Equipment Details

Stylus Profilometer
DekTakXTA
Measurement equipment
Diagnostics
Geometr. characterisation
Non-destructive evaluation
DekTak
(kein Bild verfügbar - no image available)

Stylus profilometer for surfaces and roughness measurement with line or area scan

  • Measurement area:  Max. 8“ wafer size
  • Step height: 0,5 nm ... 1 mm
  • Lateral resolution: > 1 nm in scan direction, > 1 µm between scan lines
  • Available styli: 2 µm and 50 nm tip radius
Weyers, David
T: (0351) 463 43768
WHB 133

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