Equipment Details

Surface measurement
µScan AF2000
Measurement equipment
Geometr. characterisation
Non-destructive evaluation
NanoFocus
(kein Bild verfügbar - no image available)
  • Optical 3D scanning profiles using different sensors
  • Autofocus sensor, confocal, chromatical and holografic sensor
  • Measurement of topography, surface profile or layer thickness
  • Measurement area 150 mm x 200 mm
  • Measurement area in height between 1000 μm and 18 mm
  • Height resolution down to 25 nm
  • Automatical measurements possible
Luniak, Marco, Dr.-Ing.
T: (0351) 463 32478
WHB E43

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