Gerätedetails
3D Topometry
µSurf
Measurement equipment
Geometr. characterisation
Non-destructive evaluation
NanoFocus
(kein Bild verfügbar - no image available)
- Confocal microscopy using multi-pinhole technology
- High rsolution area measurement within seconds
- Measurement of topography, surface profile and layer thickness
- Measurement area up to 50 mm x 50 mm
- Height measurement area between 1 μm and 10 mm
- Height resolution down to 1 nm
WHB E43
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