Equipment Details

3D Topometry
µSurf
Measurement equipment
Geometr. characterisation
Non-destructive evaluation
NanoFocus
(kein Bild verfügbar - no image available)
  • Confocal microscopy using multi-pinhole technology
  • High rsolution area measurement within seconds
  • Measurement of topography, surface profile and layer thickness
  • Measurement area up to 50 mm x 50 mm
  • Height measurement area between 1 μm and 10 mm
  • Height resolution down to 1 nm
Luniak, Marco, Dr.-Ing.
T: (0351) 463 32478
WHB E43

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