Gerätedetails

Exposurer
EXP 8000
Exposurer
Exposure
Photo lithography
Bungard Elektronik GmbH & Co. KG

UV light exposure of photo resists

  • Double sided exposuring
  • 2 x 4000W Hg lamps
  • Vacuum frame
  • Lightning table, working area (600 x 600)mm²
  • automatic measurement of light quantity
Hielscher, Gerald, Dr.-Ing.
T: (0351) 463 32159
WHB 164

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