Equipment Details
Fabrication Tools
Hotplate, Spincoater, UV-Cleaner
Fabrication equipment
Coating
Tempering
Cleaning
MBraun
Sample preparation
Hotplate MB-HPL150 ECO
- Temperature range 25°C - 380°C
- temp. control resolution ± 0,5°C
- accuracy ± 0,3°C
- material of the plate: ceramic coated aluminum
Spincoater LabSpin6 BM Version
- Manual coating of wafer, square substrates and wafer pieces
- Wafer round 2" to 6", Substrate Square 2" to 4" x 4"
FAM 346
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