Gerätedetails

Sample preparation

Hotplate MB-HPL150 ECO

• Temperature range 25°C - 380°C
• temp. control resolution ± 0,5°C
• accuracy ± 0,3°C
• material of the plate: ceramic coated aluminum

Spincoater LabSpin6 BM Version

• Manual coating of wafer, square substrates and wafer pieces
• Wafer round 2" to 6", Substrate Square 2" to 4" x 4"