Gerätedetails
IBS (IonBeamSputtering) deposition chamber
Creaphys
Fabrication equipment
Coating
Thin film deposition
MBraun / Creaphys
Thin film deposition of metal or mixed films
Deposition Controller
- Inficon deposition controller SQC-310
Ion Beam Source / assistance source
- KRI® KDC 40 (40mm) 3 gridded Ion Source
- Microdished™ molybdenum ion optics
- Argon ion current >113 mA
- Beam voltage >1000 V
FAM 346
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